Li-microphone tsa MEMS hangata li entsoe ka li-microcapacitive sensors tsa MEMS, li-circuits tsa phetoho tse kopantsoeng tse nyenyane, likamore tsa acoustic, le li-circuits tsa RF tse khahlanong le ho kena-kenana.Hlooho ea microcapacitance ea MEMS e kenyelletsa silicon diaphragm le silicon back electrode bakeng sa ho amohela molumo.Silicon diaphragm e ka amohela ka ho toba lets'oao la molumo 'me ea e fetisetsa ho potoloho e kopantsoeng ea micro-integrated ka MEMS micro-capacitance sensor.Potoloho e kopantsoeng e nyane e fetola lets'oao la motlakase oa molumo o phahameng oa impedance le ho Eketsoa hore e be lets'oao la motlakase le sa sebetseng hantle, le tlhotliloeng ke potoloho ea RF e khahlanong le lerata ka nako e ts'oanang, ebe e hlahisa lets'oao la motlakase le ts'oanang le potoloho ea pele, " acoustic-electrical” phetoho e phethiloe.Ka ho bala lipontšo tsa motlakase, ho lemoha molumo hoa phethahala.
Nako ea poso: Dec-06-2022
